Blank Cover Image

Large-Capacity, High-Purity Ozone Generator for Application to Semiconductor Device Processes

Author(s):
Nishiguchi, Tetsuya
Morikawa, Yoshiki
Kekura, Mitsuru
Miyamoto, Masaharu
Nonaka, Hidehiko
Ichimura, Shingo
1 more
Publication title:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-17
Pub. Year:
2001
Page(from):
625
Page(to):
631
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
Language:
English
Call no.:
E23400/200117
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Laser Ablation Of Solid Ozone

Nonaka, Hidehiko, Nishiguchi, Tetsuya, Morikawa, Yoshiki, Miyamoto, Masaharu, Ichimura, Shingo

Materials Research Society
7 Conference Proceedings Comparison of High-Purity-Ozone Oxidation on Si(111) and Si(100)

Kurokawa, A., Ichimura, S., Moon, D. W.

MRS - Materials Research Society
2 Conference Proceedings Area Controlled Oxidation of Silicon By Hyperthermal Collimated Ozone Beam

Nishiguchi, Tetsuya, Morikawa, Yoshiki, Kekura, Mitsuru, Miyamoto, Masaharu

Electrochemical Society
8 Conference Proceedings Real-time Observation of Surface Stress During Initial Ozone-Oxidation oF Si(100)

Kurokawa, Akira, Ichimura, Shingo, Narushima, Tetsuya, Itakura, Akiko N., Kitajima, Masahiro

Electrochemical Society
3 Conference Proceedings DEFECTS AND THEIR CONTROL IN Si02 FILMS PREPARED BY D2-LAMP PHOTOCHEMICAL VAPOR DEPOSITION

Nonaka, Hidehiko, Arai, Kazuo, Ichimura, Shingo

Materials Research Society
9 Conference Proceedings Hydrogen Passivation and Ozone Oxidation of Silicon Surface

Kurokawa, Akira, Nakamura, Ken, Ichimura, Shingo

MRS - Materials Research Society
4 Conference Proceedings Surface Oxidation of Si(111) by High Purity Ozone and Negative Ions Produced by Rydberg Electron Transfer

Nonaka, H., Kurokawa, A., Nakamura, K., Ichimura, S.

MRS - Materials Research Society
10 Conference Proceedings LASER-ABLATED PARTICLES FROM POROUS SILICON

Nonaka, Hidehiko, Sekine, Shigeyuki

MRS - Materials Research Society
5 Conference Proceedings Development of High Purity One ATM Ozone Source-Its Application to Ultrathin SiO2 Film Formation on Si Substrate

Koike, K., Inoue, G., Ichimura, S., Nakamura, K., Kurokawa, A., Nonaka, H.

MRS - Materials Research Society
11 Conference Proceedings Ozone Cleaning of Carbon-Related Contaminants on Si Wafers and Other Substrate Materials

Nonaka, H., Kurokawa, A., Ichimura, S., Moon, D. W.

MRS - Materials Research Society
6 Conference Proceedings Low Temperature Oxidation Processing With High Purity Ozone

Kurokawa, A., Ichimura, S., Kang, H. J., Moon, D. W.

MRS - Materials Research Society
12 Conference Proceedings Photovoltaic properties of ferroelectrics and their applications to optical sensor

M. Ichiki, H. Furue, T. Kobayashi, Y. Morikawa, K. Nonaka

Society of Photo-optical Instrumentation Engineers
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12