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Contact Processes For Advanced DRAM And CMOS Logic Devices*

Author(s):
Gambino, J.
Bandy, K.
Chapple-Sokol, J.
Conti, R.
Dobuzinsky, D.
Iggulden, R.
Maldei, M.
Peterson, K.
Rupp, T.
Stamper, T.
Stephens, J.
Sardesai, V.
Wise, M.
Wagner, T.
Weber, S.
Wistrom, R.
11 more
Publication title:
Semiconductor technology (ISTC 2001) : proceedings of the 1st International Conference on Semiconductor Technology
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-17
Pub. Year:
2001
Page(from):
473
Page(to):
484
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773508 [1566773504]
Language:
English
Call no.:
E23400/200117
Type:
Conference Proceedings

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