Blank Cover Image

Kinetic Monte Carlo Simulation of Homogeneous Nucleation of Hydrogenated Silicon Particles During Silane Decomposition

Author(s):
Publication title:
Fundamental gas-phase and surface chemistry of vapor-phase deposition II and process control, diagnostics, and modeling in semiconductor manufacturing IV : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-13
Pub. Year:
2001
Page(from):
455
Page(to):
461
Pages:
7
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773195 [1566773199]
Language:
English
Call no.:
E23400/200113
Type:
Conference Proceedings

Similar Items:

Cirshick, L., Mahajan, Milind R., Nijhawan, Sandeep, Suh, Song-Moon, Swihart, Mark T.

American Institute of Chemical Engineers

Li, Xuegeng, Swihart, Mark T.

American Institute of Chemical Engineers

Warthesen, S, Bhandarkar, U, Girshick, S, Kortshagen, U

Materials Research Society

Girshick, S.L., Swihart, M.T., Suh, S.-M., Mahajan, M.R., Nijhawan, S.

Electrochemical Society

Swihart, M.T., Li, X., He, Y., Kirkey, W.D., Cartwright, A.N., Sahoo, Y., Prasad, P.N.

SPIE - The International Society of Optical Engineering

Bhandarkar, U.V., Girshick, S.L., Swihart, M.T., Korishagen, U.R.

Electrochemical Society

H. Dang, M.T. Swihart

Electrochemical Society

Talukdar, S., Li, X., Swihart, M.T.

Electrochemical Society

Li, X., He, Y., Swihart, M.

Electrochemical Society

Catoire, L, Swihart, M.T.

Electrochemical Society

Unold, T., Branz, H. M.

MRS - Materials Research Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12