Realization of Deep p+ Zones by Al Thermomigration in a Temperature Gradient RTP Furnace

Realization of Deep p+ Zones by Al Thermomigration in a Temperature Gradient RTP Furnace

Author(s):

Publication title:

Rapid thermal and other short-time processing technologies II : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-9

Pub. Year:

2001

Page(from):

393

Page(to):

400

Pages:

8

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773157 [1566773156]

Language:

English

Call no.:

E23400/2001-9

Type:

Conference Proceedings

Details

TDL ID:	ZA00014012
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Rapid Thermal and Other Short-Time Processing Technologies ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 199th
Conf. info. (Venue):	Washington D.C., USA
Conf. info. (Date):	2001.03.24-2001.03.29

Similar Items:

1 Conference Proceedings End-point detection during the realization of deep P+ zones by Al thermomigration Dilhac,J.-M.R., Morillon,B., Ganibal,C., Anceau,C. SPIE-The International Society for Optical Engineering	7 Conference Proceedings Thick SOI films by rapid thermal processing for high voltage integrated circuits Dilhac, J.M., Cornibert, L., Charitat, G., Noihier, N., Zerrouk, D., Ganibal, C. Electrochemical Society
2 Conference Proceedings Temperature Gradient Rapid Thermal Processor Dilhac, J.-M., Ganibal, C. Electrochemical Society	8 Conference Proceedings Temperature and process control in Rapid Thermal Processing Dilhac -M. J. Kluwer Academic Publishers
3 Conference Proceedings SILICON TEMPERATURE AND THERMAL GRADIENTS MEASUREMENTS IN A RAPID THERMAL PROCESSOR OPERATING AT ATMOSPHERIC PRESSURE OR IN VACUUM Dilhac, J-M., Ganibal, C., Maritnez, A. Materials Research Society	9 Conference Proceedings KINETICS OF RAPID THERMAL OXIDATIONl CRITICAL ANALYSIS OF EXPERIMENTAL RESULTS Dilhac, J-M. Materials Research Society
4 Conference Proceedings Deep Diffusions and SOI Layers Produced by Rapid Thermal Processing for Smart Power Applications Dilhac, J-M., Cornibert, L., Ganibal, C. MRS - Materials Research Society	10 Conference Proceedings Euclid RTP 8.2 IRST software simulator Landini, S., Barani, G., Wagenaar, A.C.M., Keulen, P. van, Janssen, L.H.P., Joppe, J.L., Schwering, P.B.W., Visconti, C. SPIE
5 Conference Proceedings LEGO Process for Mixed Power Applications: Fabrication at Low Cost of Localized Thick SOI Layers I. Bertrand, J. R. Dilhac, P. Renaud, M. Bafleur, C. Ganibal Electrochemical Society	11 Conference Proceedings A New High-Temperature Furnace Chamber Fantner,E.B., Koppelhuber-Bitschnau,B., Mautner,F.A., Doppler,P., Gautsch,J. Trans Tech Publications
6 Conference Proceedings IN SITU WAFER EMISSIVITY VARIATION MEASUREMENT IN A RAPID THERMAL PROCESSOR Dilhac, J-M., Ganibal, C., Nolhier, N. Materials Research Society	12 Conference Proceedings Localized plasmon-enhanced optical response: harmonic generation and polarization effects Gadenne,P., Berini,B., Buil,S., Quelin,X., Anceau,C., Gresillon,S., Ducourtieux,S., Rrivoal,J.C., Breit,M., Bourdon,A., … SPIE-The International Society for Optical Engineering

1

2

3

4

5

6

7

8

9

10

11

12