Blank Cover Image

Device Fabrication and Evaluation of Alternative High-K Dielectrics and Gate Electrodes Using a Non-Self Aligned Gate process

Author(s):
Kim, I.
Han, S.K.
Kiether, W.
Lee, S.J.
Lee, C.H.
Luan, H.F.
Luo, Z.
Rying, E.
Wicaksana, Z.Wang D.
Zhu, W.
Hauser, J.
Kiingon, A.
Kwang, D.L.
Ma, T.P.
Maria, J.P.
Misra, V.
Osburn, C.M.
12 more
Publication title:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-9
Pub. Year:
2001
Page(from):
211
Page(to):
220
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
Language:
English
Call no.:
E23400/2001-9
Type:
Conference Proceedings

Similar Items:

Osburn, C.M., Han, S.K., Kim, I., Campbell, S.A., Garfunkel, E., Gustafson, T., Hauser, J., King, T.-J., Liu, Q., …

Electrochemical Society

Kiether, W.J., Wang, Z., Li, W., Hauser, J.

Electrochemical Society

Han, S.K, Kim, I., Zhong, H, Heuss, G.P., Lee, J.H, Wicairsana, D., Maria, J.P., Misra, V., Osburn, C.M.

Electrochemical Society

Lee, S.J., Luan, H.F., Lee, C.H, Senzoki, Y, Roberts, D., Kwong, D.-L.

Electrochemical Society

Lee, S.J., Luan, H.F., Bai, W.P., Lee, C.H., Clark, B., Rabents, D., Myers, L., Kwang, D.L.

Electrochemical Society

Thees, H.-J., Osburn, C.M., Shiely, J.P., Massoud, H.Z.

Electrochemical Society

Lee, C.H., Luan, H.F, Bat, W.P., Lee, S.J., Jean, T.S., Roberts, D., Kwong, D.L.

Electrochemical Society

Lee, S.-B., Robinson, L.A.W., Teo, K.B.K., Chhowalla, M., Amaratunga, G.A.J., Milne, W.I., Hasko, D.G., Ahmed, H.

Materials Research Society

Kim, I., Finn, S.K., Osburn, C.M.

Electrochemical Society

C. Osburn, S. Campbell, A. Demkov, E. Eisenbraun, E. Garfunkel, F. Gustafsson, A. I. Kingon, J. Lee, D. Lichtenwalner, …

Electrochemical Society

Kingon, A.I., Maria, J.P., Wicaksana, D., Parrette, J.

Electrochemical Society

Ishizuka, Y., Wicaksana, D., Maria, J.P., Kingon, A.I.

Electrochemical Society

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12