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Hot-Wall RTP for Thin Gate Oxide and Silicon Nitride

Author(s):
Senzaki, Y.
Sisson, J.
Herring, R.
Yao, J.
Teasdale, D.
Ricketts, J.
Dostal, D.
Barelli, C.
3 more
Publication title:
Rapid thermal and other short-time processing technologies II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-9
Pub. Year:
2001
Page(from):
61
Page(to):
66
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773157 [1566773156]
Language:
English
Call no.:
E23400/2001-9
Type:
Conference Proceedings

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