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Reduced Clean Time and PFC Emissions Reduction Through Remote Plasma Clean For Lamp Heated CVD Chambers

Author(s):
Mendicino, L. ( (Motorola), )
Nauert, C. ( (Motorola), )
Brown, P.T. ( (Motorola), )
Golovato, S. ( (Motorola), )
Day, B. ( (Motorola), )
Atherton, A. ( (Applied Materials) )
Nowak, T. ( (Applied Materials) )
Silvetti, D. ( (Applied Materials) )
Hartz, C. ( (Air Products and Chemicals) )
Johnson, A. ( (Air Products and Chemicals) )
Maroulis, P. ( (Air Products and Chemicals) )
6 more
Publication title:
Environmental Issues with Materials and Processes for the Electronics and Semiconductor Industries : proceedings of the fourth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-6
Pub. Year:
2001
Page(from):
15
Page(to):
27
Pages:
13
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773126 [1566773121]
Language:
English
Call no.:
E23400/2001-6
Type:
Conference Proceedings

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