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Effect of SiGe Layer on Electrical Characteristics of SGI-PDSOI MOSFETs

Author(s):
Choc, T.H.
Bac, G.J.
Kim, S.S.
Rhee, H.S.
Lee, K.W.
Lee, N.I.
Kang, H.S.
Fujihara, K.
Kang, H.K.
Moon, J.T.
5 more
Publication title:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-3
Pub. Year:
2001
Page(from):
349
Page(to):
354
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773096 [1566773091]
Language:
English
Call no.:
E23400/2001-3
Type:
Conference Proceedings

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