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Defects and Strain in Hydrogen and Helium Co-Implanted Silicon

Author(s):
Duo, X.
Liu, W.
Zhang, M.
Wang, S.X.
Wang, L.M.
Lin, C.
1 more
Publication title:
Silicon-on-Insulator Technology and Devices X : proceedings of the tenth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2001-3
Pub. Year:
2001
Page(from):
69
Page(to):
74
Pages:
6
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566773096 [1566773091]
Language:
English
Call no.:
E23400/2001-3
Type:
Conference Proceedings

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