Characterization of Traps in ONO Films for MONOS Nonvolatile Memories

Characterization of Traps in ONO Films for MONOS Nonvolatile Memories

Author(s):

Publication title:

ULSI Process Integration : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2001-2

Pub. Year:

2001

Page(from):

534

Page(to):

538

Pages:

5

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566773089 [1566773083]

Language:

English

Call no.:

E23400/2001-2

Type:

Conference Proceedings

Details

TDL ID:	ZA00014006
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on ULSI Process Integration ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 199th
Conf. info. (Venue):	Washington, D.C., USA
Conf. info. (Date):	2001.03.24-2001.03.31

Similar Items:

1 Conference Proceedings Retention Characteristics of MONOS Nonvolatile Memories Aozasa, H., Fujiwara, I., Yamauchi, K., Koyama, K., Kobayashi, T. Electrochemical Society	7 Conference Proceedings Expansion of measuring range of stereovision system based on Mono-MoCap [6375-26] Takahashi, H., Tanaka, T., Kaneko, S. SPIE - The International Society of Optical Engineering
2 Conference Proceedings Effects of Nitridation Treatment for Electrochemical Properties of MONOS Non-Volatile Memories Aozasa, H., Fujiwara, I., Nomoto, K., Komatsu, H., Kobayashi, T. Electrochemical Society	8 Conference Proceedings Characterization of Hole Trapping in Ultra- Thin Chemical Oxides by Means of X-Ray Photoelectron Spectroscopy Time- Dependent Measurements Hagimoto, V., Fujita, T., Ono, K., Fujioka, H., Oshima, M., Hirose, K., Tajima, M. Electrochemical Society
3 Conference Proceedings Characterization of a high-quality and UV-transparent PECVD silicon nitride film for nonvolatile memory applications C.K. Wang, T.L. Ying, C.S. Wei, L.M. Liu, H.-C. Cheng Society of Photo-optical Instrumentation Engineers	9 Conference Proceedings DOUBLE LAYERED CZ (DLCZ) SILICON CRYSTAL GROWTH Kobayashi, S., Fujiwara, H., Fujiwara, T., Kubo, T., Inami, S., Okui, M., Miyahara, S., Akashi, Y., Kuramochi, K., … Electrochemical Society
4 Conference Proceedings Novel fiber amplifier technology (Invited Paper) Yamada, M., Aozasa, S., Ono, H., Mori, A., Sakamoto, T., Shikano, K., Shimizu, M. SPIE-The International Society for Optical Engineering	10 Conference Proceedings Femtosecond Spectroscopic Study for the Self-Trapping Process of Holes in Alkali Halides Fujiwara,H., Suzuki,T., Tanimura,K. Trans Tech Publications
5 Conference Proceedings Low-temperature Si dot thin-film-transistor memory Nomoto, K., Gosain, D. P., Noguchi, T., Usui, S., Mori, Y. MRS-Materials Research Society	11 Conference Proceedings Multi-Dot Floating-Gates In MOSFETs for Nonvolatile Memories -Their Ion Beam Synthesis and Morphology Muller, T., Heinig, K.-H., Bonafos, C., Coffin, H., Cherkashin, N., Assayag, G. Ben, Schamm, S., Zanchi, G., Claverie, … Materials Research Society
6 Conference Proceedings MATERIALS CHARACTERIZATION OF NONDESTRUCTIVE READOUT NONVOLATILE MEMORY DEVICES Tuttle, Bruce A., McIntyre, Dale C., Seager, Carleton H., Garino, Terry J., Warren, William L., Evans, Joseph T., … MRS - Materials Research Society	12 Conference Proceedings Characterization of Oxide Films on SiC Epitaxial (0001) Faces by Angle-Resolved Photoemission Spectroscopy Measurements Using Synchrotron Radiation Hijikata, Y., Yaguchi, H., Yoshida, S., Takata, Y., Kobayashi, K., Shin, S., Nohira, H., Hattori, T. Trans Tech Publications

1

2

3

4

5

6

7

8

9

10

11

12