Blank Cover Image

ECR-PECVD of Silicon Nitride and Hydrogenated Amorphous Silicon at 80℃ For TFTs

Author(s):
Publication title:
Thin Film Transistor Technologies V : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-31
Pub. Year:
2000
Page(from):
25
Page(to):
33
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772983 [1566772982]
Language:
English
Call no.:
E23400/200031
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Hydrogenated Amorphous Silicon And Silicon Nitride Deposited At Less Than 100°C By ECR-PECVD For Thin Film Transistors

Dyson, A. P., Flewitt, A. J., Milne, W. I., Robertson, J.

Materials Research Society
7 Conference Proceedings Kinetics of field-aided nickel induced Iateral crytallisation of hydrogenated amorphous silicon

Flewitt, A. J, Kulkarni, S. K., Izmajlowicz, M. A. T., Morrison, N. A., Milne, W. I.

Springer
2 Conference Proceedings Low Temperature Growth of High Quality SiO2 at Less Than 100℃ By ECR-PECVD For Thin Film Transistors

Rashid, Riyaz, Flewitt, A.J., Robertson, John, Milne, W.I.

Electrochemical Society
8 Conference Proceedings PHOTOENHANCED DEPOSITION OF SILICON OXIDE THIN FILMS USING AN INTERNAL NITROGEN DISCHARGE LAMP

Robertson, P.A., Milne, W.I.

Materials Research Society
3 Conference Proceedings Scanning Tunneling Microscopy Study of the Growth Mechanism for Hydrogenated Amorphous Silicon Produced by Plasma Enhanced Chemical Vapor Deposition

Flewitt, A. J., Milne, W. I., Robertson, J., Stephenson, A. W., Welland, M. E.

MRS - Materials Research Society
9 Conference Proceedings REDUCTION OF THRESHOLD VOLTAGE SHIFT BY BIAS ANNEALING OF HYDROGENATED AMORPHOUS SILICON THIN FILM TRANSISTORS

Deane, S.C., Milne, W.I., Powell, M.J.

Materials Research Society
4 Conference Proceedings AMORPHOUS HYDROGENATED SILICON THIN FILM TRANSISTORS MANUFACTURED BY A PHOTO-CVD TECHNIQUE

Baker, S.D., Milne, W.I., Robertson, P.A.

Materials Research Society
10 Conference Proceedings Mechanisms for Defect Creation and Removal in Hydrogenated and Deuterated Amorphous Silicon Studied using Thin Film Transistors

Andrew J. Flewitt, Shufan Lin, William I. Milne, Ralf B. Wehrspohn, Martin J. Powell

Materials Research Society
5 Conference Proceedings Microcrystalline Silicon Thin Film Growth by Electron Cyclotron Resonance Chemical Vapour Deposition at 80℃ for Plastic Application

Bu, Ian Y. Y., Flewitt, A. J., Robertson, J., Milne, W. I.

Materials Research Society
11 Conference Proceedings Growth Processes Of Hydrogenated Amorphous Silicon

Robertson, J.

Materials Research Society
6 Conference Proceedings HYDROGENATED AMORPHOUS SILICON THIN-FILM DEPOSITION BY DIRECT PHOTO-ENHANCED DECOMPOSITION OF SILANE USING AN INTERNAL HYDROGEN DISCHARGE LAMP

Roberston, P.A., Milne, W.I.

Materials Research Society
12 Conference Proceedings The Use Of C-V Techniques To Investigate Instability Mechanisms In M-I-S Structures

Paul, S., Milne, W.I, Robertson, J.

Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12