Effects of Annealing on the Residual Stress and Bending in Sputtered Thin Films of Giant Magnetostrictive Alloys

Effects of Annealing on the Residual Stress and Bending in Sputtered Thin Films of Giant Magnetostrictive Alloys

Author(s):

Publication title:

Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-29

Pub. Year:

2000

Page(from):

521

Page(to):

535

Pages:

15

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772969 [1566772966]

Language:

English

Call no.:

E23400/200029

Type:

Conference Proceedings

Details

TDL ID:	ZA00013998
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Magnetic Materials, Processes, and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	6th ; 198th
Conf. info. (Venue):	Phoenix, Arizona, USA
Conf. info. (Date):	2000.10.23-2000.10.26

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