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Submicron Write Track Fabrication Using RIE and KrF Excimer Laser Stepper

Author(s):
Okada, T.
Yoshida, N.
Etoh, K.
Nunokawa, I.
Fuyama, M.
Kawabe, T.
1 more
Publication title:
Magnetic Materials, Processes, and Devices VI, Applications to Storage and Microelectromechanical Systems (MEMS) : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-29
Pub. Year:
2000
Page(from):
348
Page(to):
358
Pages:
11
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772969 [1566772966]
Language:
English
Call no.:
E23400/200029
Type:
Conference Proceedings

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