Blank Cover Image

Non-Destructive Evaluation of CMP Pads Using Scanning Ultrasonic Technique

Author(s):
Diaz, A.Belyaev; F.
Moreno, W.
Ostapenko, S.
Pacheno, F.
Tarasov, I.
Totzke, D.
1 more
Publication title:
Chemical Mechanical Planarization : proceedings of the International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-26
Pub. Year:
2000
Page(from):
94
Page(to):
101
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772938 [1566772931]
Language:
English
Call no.:
E23400/200026
Type:
Conference Proceedings

Similar Items:

Zantye, P., Sikder, A., Kumar, A., Belyaev, A., Tarasov, I., Ostapenko, S.

Electrochemical Society

Ostapenko,S.

Trans Tech Publications

Sikder, A.K., Irfan, I.M., Kumar, Ashok, Belyaev, A., Ostapenko, S., Calves, M., Harmon, J.P., Anthony, J.M.

Materials Research Society

Coste,J.F., Lakestani,F., Vortrefflich,W.J.

Trans Tech Publications

Belyaev, A., Tarasov, I., Ostapenko, S., Koveshnikov, S., Kochelap, V.A., Beyaev, A.E.

Electrochemical Society

Tarasov,I., Ostapenko,S., Haessler,C., Raisner,E.-U.

SPIE - The International Society for Optical Engineering

Belyaev,A., Tarasov,I., Ostapenko,S., Koveshnikov,S., Kochelap,V.A., Beyaev,A.E.

Electrochemical Society, SPIE-The International Society for Optical Engineering

Montoto, M., Calleja, L., Perez, B., Esbert, R. M.

Materials Research Society

Rain, M.F., McCusker, N.D., McCann, P., Nevin, W.A., Gamble, H.S.

Electrochemical Society

11 Conference Proceedings Scanning Acoustic Microscopy in Porous SiC

Ostapenko, S., Smith, M.C.D., Tarasov, I., Wolan, J.T., Mynbaeva, M., Goings, J., McKeon, J.C.P., Saddow, S.E.

Trans Tech Publications

Sadana, D.K., Hao, H.-Y., Maris, H.J.

Electrochemical Society

12 Conference Proceedings Scanning Acoustic Microscopy in Porous SiC

Ostapenko, S., Smith, M.C.D., Tarasov, I., Wolan, J.T., Mynbaeva, M., Goings, J., McKeon, J.C.P., Saddow, S.E.

Trans Tech Publications

1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12