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Investigation Regarding Inductive Coupled Plasma Abatement Unit for C2F6 PECVD Cleaning Gas with Added Oxygen

Author(s):
Sunada, T
Wani, E.
Suzuki, S.
Shibata, K.
Kosano, Y.
Mitsui, Y.
Takaichi, T.
Beppu, T.
Sekiya, A.
4 more
Publication title:
The global climate change : a coordinated response by electrochemistry and solid-state science and technology : proceedings of the first International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-20
Pub. Year:
2000
Page(from):
242
Page(to):
253
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772877 [1566772877]
Language:
English
Call no.:
E23400/200020
Type:
Conference Proceedings

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