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300 mm Epi PP Wafer: Is There Sufficient Gettering?

Author(s):
Graff, D.
Lambert, U.
Schmolke, R.
Wablich, R.
Siebert, W.
Daub, E.
Ammon, W.v.
2 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. Year:
2000
Page(from):
319
Page(to):
330
Pages:
12
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

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