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Advanced Silicon Wafers for 0.18 μm Design Rule and Beyond: Epi and fFLASH!*

Author(s):
Schmolke, R.
Blietz, M.
Schauer, R.
Zemke, D.
Oelkrug, H.
Ammon, W.v.
Lambert, U.
Grtlf, D.
3 more
Publication title:
High Purity Silicon VI : proceedings of the sixth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-17
Pub. Year:
2000
Page(from):
3
Page(to):
18
Pages:
16
Pub. info.:
Bellingham, Wash.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772846 [1566772842]
Language:
English
Call no.:
E23400/200017
Type:
Conference Proceedings

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