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Use of Ti(dpm)2(OPr)2 Precursor to Obtain TiO2 Film

Author(s):
Kritsyuk, F.
Turgontbaeea, A.E.
Iguntenov, I.K.
Bessergenev, V.G.
Khmelinskii, I.V.
Pereira, R.F.
1 more
Publication title:
CVD XV, proceedings of the fifteenth International Symposium on Chemical Vapor Deposition
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-13
Pub. Year:
2000
Page(from):
284
Page(to):
291
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772785 [1566772788]
Language:
English
Call no.:
E23400/200013
Type:
Conference Proceedings

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