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Athermal Annealing of Silicon Implanted with Phosphorus and Arsenic

Author(s):
Grun, J.
Fischer, R.P.
Peckerar, M.
Felix, C.L.
Covington, B.C.
Donnelly, D.W.
Boro Djordjevic, B.
Mignogna, R.
Meyer, J.R.
Ting, A.
Manka, C.K
6 more
Publication title:
Rapid thermal and other short-time processing technologies : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-9
Pub. Year:
2000
Page(from):
107
Page(to):
118
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772747 [1566772745]
Language:
English
Call no.:
E23400/2000-9
Type:
Conference Proceedings

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