Athermal Annealing of Silicon Implanted with Phosphorus and Arsenic
- Author(s):
Grun, J. Fischer, R.P. Peckerar, M. Felix, C.L. Covington, B.C. Donnelly, D.W. Boro Djordjevic, B. Mignogna, R. Meyer, J.R. Ting, A. Manka, C.K - Publication title:
- Rapid thermal and other short-time processing technologies : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-9
- Pub. Year:
- 2000
- Page(from):
- 107
- Page(to):
- 118
- Pages:
- 12
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772747 [1566772745]
- Language:
- English
- Call no.:
- E23400/2000-9
- Type:
- Conference Proceedings
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