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Cathodic Reactions in Copper Chemical Mechanical Polishing: The Cu/Fe3+ and Cu/H202 Systems

Author(s):
Publication title:
Electrochemical processing in ULSI fabrication III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-8
Pub. Year:
2000
Page(from):
214
Page(to):
226
Pages:
13
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772730 [1566772737]
Language:
English
Call no.:
E23400/2000-8
Type:
Conference Proceedings

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