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Trends in Properties of Electroplated Cu with Plating Conditions and Chemistry

Author(s):
Horkans, Jean
Gabral, Cyril, Jr.
Rodbell, Kenneth P.
Parks, Christopher
Gribelyuk, Michael A.
Malhotra, Sandra
Andricacos, Panayotis C.
2 more
Publication title:
Electrochemical processing in ULSI fabrication III : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-8
Pub. Year:
2000
Page(from):
110
Page(to):
122
Pages:
13
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772730 [1566772737]
Language:
English
Call no.:
E23400/2000-8
Type:
Conference Proceedings

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