Copper Removal from Chemical Mechanical Polishing Effluent
- Author(s):
- Riley, C. ( USFilter Recovery Services, Inc. )
- Filson, J. ( USFilter Recovery Services, Inc. )
- Mendicino, L. ( Motorola )
- Brown, P.T. ( Motorola )
- Publication title:
- Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 2000-7
- Pub. Year:
- 2000
- Page(from):
- 174
- Page(to):
- 184
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772723 [1566772729]
- Language:
- English
- Call no.:
- E23400/2000-7
- Type:
- Conference Proceedings
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