Blank Cover Image

Risk-Based Evaluation of Bulk Anhydrous Hydrogen Chloride Delivery Alternatives Used in the Semiconductor Industry

Author(s):
Publication title:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-7
Pub. Year:
2000
Page(from):
160
Page(to):
173
Pages:
14
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772723 [1566772729]
Language:
English
Call no.:
E23400/2000-7
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction

Mendicino, L., Nauert, C., Flood, J., Brown, P.T., Atherton, A., Nowak, T., Silvetti, D.

Electrochemical Society
7 Conference Proceedings Interface Characterization in the Semiconductor Industry

A. C. Diebold, P. Y. Hung, J. Price, B. Foran, H. Celio, T. Kelly

Electrochemical Society
2 Conference Proceedings Electrochemical Conversion of Anhydrous Hydrogen Chloride to Chlorine in a Proton Exchange Membrane Reactor

Tatapudi, P., Villwock, R., Springer, T.E., Wilson, M.S., Gottesfeld, S.

Electrochemical Society
8 Conference Proceedings Gallium Nitride Growth Using Diethylgallium Chloride as an Alternative Gallium Source

Zhang, L., Zhang, R., Boleslawski, M. P., Kuech, T. F.

MRS - Materials Research Society
3 Conference Proceedings Emergency Preparedness and Response for Semiconductor Manufacturing

Harris, S., Nauert, C.

Electrochemical Society
9 Conference Proceedings An Alternative Fuel for Lime Industry: Evaluation the Pyrolysis of the Scrap Tires

A.R. Partata, P.M. Parreira, H.M. Henrique, C.E.B. Avelar

Trans Tech Publications
4 Conference Proceedings EHS Infrastructure Issues in Modern Wafer Fabs

Brown, P.T., Reblin, R., Heironimus, J., Nauert, C., Mendicino, L.

Electrochemical Society
10 Conference Proceedings Reduced Clean Time and PFC Emissions Reduction Through Remote Plasma Clean For Lamp Heated CVD Chambers

Mendicino, L., Nauert, C., Brown, P.T., Golovato, S., Day, B., Atherton, A., Nowak, T., Silvetti, D., Hartz, C., …

Electrochemical Society
5 Conference Proceedings PFC Emissions Reduction and Process Improvements with Remote Plasma CVD Chamber Cleans

Mendicino, L., Brown, P.T., Filipiak, S., Nauert, C., Estep, H., Fletcher, M.

Electrochemical Society
11 Conference Proceedings Benzene hydrogenation over Pt/siliceous zeolites

T.C. Tsai, L.W. Wang, C.L. Lu, P.R. Tsai, H.W. Chen, P.H. Liao, S.B. Liu

Elsevier
6 Conference Proceedings THERMALLY DRIVEN IN-SITU REMOVAL OF NATIVE OXIDE USING ANHYDROUS HYDROGEN FLUORIDE

Apte, Pushkar P., Park, Heungsoo, Saraswat, Krishna C., Helms, C. R.

MRS - Materials Research Society
12 Conference Proceedings A Biological Data Base for Methylene Chloride Risk Assessment

Green T.

Plenum Press
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12