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Evaluation of the Applied Materials Remote Clean TM Technology for Lamp Heated CVD Chambers for Perfluorocompound (PFC) Emissions Reduction

Author(s):
Mendicino, L. ( Motorola )
Nauert, C. ( Motorola )
Flood, J. ( Motorola )
Brown, P.T. ( Motorola )
Atherton, A. ( Applied Materials )
Nowak, T. ( Applied Materials )
Silvetti, D. ( Applied Materials )
2 more
Publication title:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-7
Pub. Year:
2000
Page(from):
42
Page(to):
51
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772723 [1566772729]
Language:
English
Call no.:
E23400/2000-7
Type:
Conference Proceedings

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