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Litmas Plasma Abatement Long-Term Reliability Test

Author(s):
Vartanian, V. ( Motorola )
Beu, L. ( Motorola )
Stephens, T. ( Motorola )
Rivers, J. ( Motorola )
Perez, B. ( Motorola )
Kiehlbauch, M. ( University of California at Berkeley )
Tonnisand, E. ( University of California at Berkeley )
Graves, D. ( University of California at Berkeley )
3 more
Publication title:
Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
2000-7
Pub. Year:
2000
Page(from):
9
Page(to):
20
Pages:
12
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772723 [1566772729]
Language:
English
Call no.:
E23400/2000-7
Type:
Conference Proceedings

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