An Efficient, Highly Reliable Plasma Tool for PFC Abatement

An Efficient, Highly Reliable Plasma Tool for PFC Abatement

Author(s):

Chen, X. ( ASTeX )
Holber, W. ( ASTeX )
Peter, M. ( ASTeX )

Publication title:

Environmental issues in the electronics and semiconductor industries : proceedings of the third international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

2000-7

Pub. Year:

2000

Page(from):

1

Page(to):

8

Pages:

8

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772723 [1566772729]

Language:

English

Call no.:

E23400/2000-7

Type:

Conference Proceedings

Details

TDL ID:	ZA00013976
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 197th
Conf. info. (Venue):	Toronto, Ontario, Canada
Conf. info. (Date):	2000.05.00

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