CMP Characteristics According to Sluny Injection Position
- Author(s):
- Publication title:
- Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-37
- Pub. Year:
- 1999
- Page(from):
- 402
- Page(to):
- 407
- Pages:
- 6
- Pub. info.:
- Pennington, N. J.: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772600 [1566772605]
- Language:
- English
- Call no.:
- E23400/99-37
- Type:
- Conference Proceedings
Similar Items:
1
Conference Proceedings
Electrode Effect on Microwave Properties of Ferroelectric (BaxSr1-x)TiO3 Thin Films
Materials Research Society |
7
Conference Proceedings
A Study on the Air Flow Characteristic of Apartments According to Layout Form
Trans Tech Publications |
Materials Research Society |
Materials Research Society |
3
Conference Proceedings
Width and Gap Dependent Performance of Ferroelectric Coplanar Waveguide Phase Shifter Based on (Ba,Sr)TiO3 Thin Films
Materials Research Society |
MRS - Materials Research Society |
4
Conference Proceedings
(220r) Extra-Heavy OIL Fractions Upgrading Characteristics In A DUAL Circulating Fluidized BED Reactor
American Institute of Chemical Engineers |
American Society of Mechanical Engineers |
5
Conference Proceedings
Effects of Preferred Orientation on the Tribological Behavior of the TiN and CrN Films by the CAIP
Materials Research Society |
Materials Research Society |
Materials Research Society |
American Institute of Chemical Engineers |