Comparisons of Polisher Designs on the Performance of STI Planarization

Comparisons of Polisher Designs on the Performance of STI Planarization

Author(s):

Goh, K

Publication title:

Chemical mechanical planariarization in IC device manufacturing III : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

99-37

Pub. Year:

1999

Page(from):

57

Page(to):

70

Pages:

14

Pub. info.:

Pennington, N. J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772600 [1566772605]

Language:

English

Call no.:

E23400/99-37

Type:

Conference Proceedings

Details

TDL ID:	ZA00013965
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Chemical Mechanical Planarization ; Meeting of the Electrochemical Society ; Fall Meeting of the Electrochamical Society of Japan
Conf. info. (Number):	3rd ; 196th ; 1999
Conf. info. (Venue):	Honolulu, Hawaii, USA
Conf. info. (Date):	1999.10.20-1999.10.22

Similar Items:

1 Conference Proceedings Dishing Reduction Using Polysilicon Buffer STI-CMP Scheme Lim, Victor S K., Chen, Feng, Goh, Wang Lih, See, LapChan.Alex, Lee, Kong Hean, Zou, Zheng, Proctor, Paul, Ang, Ting … Electrochemical Society	7 Conference Proceedings ADVANCED PLANARIZE ALUMINUM METALLIZATION PROCESS Chen, F. S., Dixit, G. A., Staman, J. W., Wei, C. C., Liou, F. T. Materials Research Society
2 Conference Proceedings Comparison of spin-on materials in IMD planarization Chooi,S.Y.M., Ang,C.-H., Zheng,J.-Z., Chan,L. SPIE-The International Society for Optical Engineering	8 Conference Proceedings Optical performance monitoring and network diagnosis in reconfigurable optical networks L. K. Chen, C. C. K. Chan, G. W. Lu, Y. C. Ku, S. T. Ho Society of Photo-optical Instrumentation Engineers
3 Conference Proceedings Evaluation of 02- and N2- Addition in Via Etching and CHF3/02 Post Etch Treatment Ho, C.N., Higelin, G., Low, C.H., See, A., Chan, L., Chua, D.H.C. Electrochemical Society	9 Conference Proceedings Performance analysis of multidimensional optical routing networks Zhang, Y., Chen, L.-K., Chan, C.-K. SPIE-The International Society for Optical Engineering
4 Conference Proceedings Planarization for reverse-tone step and flash imprint lithography [6151-89] Lin, M. W., Chao, H. L., Hao, J., Kim, E. K., Palmieri, F., Kim, W. C., Dickey, M., Ho, P. S., Willson, C. G. SPIE - The International Society of Optical Engineering	10 Conference Proceedings Torsion Sensor Made of Corrugated Long Period Fiber Grating A.,Wang L., Y.,Lin C., W.,Chern G. CNR
5 Conference Proceedings Low Cost and Effective IMP Planarization Using CMP and Resist Etchback Lim, Victor S.K., Chen, Feng, Goh, Wang Ling, Low, Chun Hui, Chan, Lap, Koo, Chee Kiong, Teh, Young Way, Ang, Ting … Electrochemical Society	11 Conference Proceedings Impact of Indium and Boron Interaction on Short Channel and Reverse Short Channel Effects for NMOSFETs Ong, S.Y., Chor, E.F., Lee, J., Leung, Y.K., See, A., Chan, L. Electrochemical Society
6 Conference Proceedings Steep retrograde indium channel profiling for high-performance nMOSFETs device fabrication Ong,S.Y., Chor,E.F., Leung,Y.K., Lee,J., Li,W.S., See,A., Chan,L.H. SPIE-The International Society for Optical Engineering	12 Conference Proceedings Performance results of the STIS flight MAMA detectors C.L. Joseph, V.S. Argabright, J. Abraham, D. Dieball, S. Franka Society of Photo-optical Instrumentation Engineers

1

2

3

4

5

6

7

8

9

10

11

12