OPTIMISATION OF dHF-BASED CLEANING RECIPES: TO REMOVE OR NOT TO REMOVE A PARTICLE?
- Author(s):
- Publication title:
- Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-36
- Pub. Year:
- 1999
- Page(from):
- 461
- Page(to):
- 468
- Pages:
- 8
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772594 [1566772591]
- Language:
- English
- Call no.:
- E23400/99-36
- Type:
- Conference Proceedings
Similar Items:
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |
8
Conference Proceedings
HF-LAST CLEANINGS: A STUDY OF THE PROPERTIES WITH RESPECT TO THE DIFFERENT VARIABLES
MRS - Materials Research Society |
Electrochemical Society |
MRS - Materials Research Society |
Electrochemical Society |
Electrochemical Society |
5
Conference Proceedings
EVALUATION OF MEGASONIC CLEANING SYSTEMS FOR PARTICLE REMOVAL EFFICIENCY AND DAMAGING
Electrochemical Society |
11
Conference Proceedings
COMPARISON OF HC1 GAS-PHASE CLEANING WITH CONVENTIONAL AND DILUTE WET CHEMISTRIES
Electrochemical Society |
Electrochemical Society |
Electrochemical Society |