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A LIFETIME ANALYSIS OF DILUTE CHEMISTRY WAFER CLEANING: FASTER, CLEANER, CHEAPER

Author(s):
McNamara, J.M.
Hackenberg, D.L.
Linn, J.H.
Rouse, G.V.
Slasor, S.T.
Yates, P.D.
1 more
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. Year:
1999
Page(from):
368
Page(to):
376
Pages:
9
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

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