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PROPERTIES OF CHEMICAL OXIDES FROM PRE-GATE CLEAN PROCESSES AND THEIR ROLE IN THE ELECTRICAL THICKNESS OF THERMALLY GROWN ULTRATHIN GATE OXIDES

Author(s):
Guan, J.
Gale, G.
Bersuker, G.
Jeon, Y.
Nguyen, B.
Barnett, J.
Jackson, M.
Burkman, D.
Peavey, P.
Yokomizo, K.
Ueno, K.
Yamasaka, M.
Imai, M.
Kitahara, S.
Shindo, N.
10 more
Publication title:
Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-36
Pub. Year:
1999
Page(from):
77
Page(to):
83
Pages:
7
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772594 [1566772591]
Language:
English
Call no.:
E23400/99-36
Type:
Conference Proceedings

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