ADVANCED CLEANING STRATEGIES FOR ULTRA-CLEAN SILICON SURFACES
- Author(s):
Heyns, Marc Bearda, Twan Cornelissen, Ingrid De Gendt, Stefan Loewenstein, Lee Mertens, Paul Mertens, Sofie Meuris, Marc Schaekers, Mark Teerlinck, Ivo Vos, Rita Wolke, Klaus - Publication title:
- Cleaning technology in semiconductor device manufacturing : proceedings of the sixth international symposium
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 99-36
- Pub. Year:
- 1999
- Page(from):
- 3
- Page(to):
- 16
- Pages:
- 14
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772594 [1566772591]
- Language:
- English
- Call no.:
- E23400/99-36
- Type:
- Conference Proceedings
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