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Hetero-Epitaxial Growth of 3C-SiC on SOI using HMDS

Author(s):
Aboughe-Nze, P.
Planes, N.
Ravetz, M.
Fraisse, B.
Contreras, S.
Vicente, P.
Chassagne, T.
Monteil, Y.
Rushworth, S.
Camassel, J.
5 more
Publication title:
Semiconductor wafer bonding : science, technology, and applications : proceedings of the international symposia
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-35
Pub. Year:
1999
Page(from):
92
Page(to):
99
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772587 [1566772583]
Language:
English
Call no.:
E23400/99-35
Type:
Conference Proceedings

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