Blank Cover Image

Elementary Reaction Simulation of Al-CVD Using Dimethyl Aluminum Hydride

Author(s):
Sugiyama, M.
Nakajima, T.
Tanaka, T.
Itoh, H.
Aoyama, J.
Egashira, Y.
Yamashita, K.
Komiyama, H.
Shimogaki, Y.
4 more
Publication title:
Interconnect and contact metallization for ULSI : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-31
Pub. Year:
1999
Page(from):
56
Page(to):
67
Pages:
12
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772549 [1566772540]
Language:
English
Call no.:
E23400/99-31
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Theoretical Optimization of Al-CVD using Elementary Reaction Simulation

Sugiyama, M., Iino, T., Nakajima, T., Tanaka, T., Itoh, H., Aoyama, J., Egashira, Y., Yamashita, K., Komiyama, H., …

Electrochemical Society
7 Conference Proceedings Reaction Analysis For Tetraethoxysilane And Ozone Atmospheric Pressure Chemical Vapor Deposition Doped Oxides

Fujino, K., Egashira, Y., Shimogaki, Y., Komiyama, H.

Electrochemical Society
2 Conference Proceedings Surface Analysis of Al Film Prepared from Dimethyl-Aluminum-Hydride

Sugiyama, M., Ogawa, H., Itoh, H., Aoyama, J., Horiike, Y., Komiyama, H., Shimogaki, Y.

Electrochemical Society
8 Conference Proceedings Computer-Aided Reaction Design (CARD) to Investigate the Control of SIH4/O2 CVD by Gas-Phase Additives

Takahashi, T., Hagiwara, K., Egashira, Y., Komiyama, H.

Electrochemical Society
3 Conference Proceedings Reaction Products of AI-CVD from Dimethyl-Aluminumhydride Observed by Infrared Spectroscopy

Suglyama, M., Shimogaki, Y., Itoh, H., Aoyama, J., Toshimi, T., Komiyama, H.

Electrochemical Society
9 Conference Proceedings A Design Policy of the SiC CVD Reactor Based on the Chemical Reaction Kinetics of Dichlodimethylsilane

Takeuchi, T., Egashira, Y., Komiyama, H.

Electrochemical Society
4 Conference Proceedings Step Coverage Simulation for TEOS/03 Atmospheric Pressure CVD

Fujino, K., Egashira, Y., Shimogaki, Y., Komiyama, H.

Electrochemical Society
10 Conference Proceedings Theoretical Reactor Design from the Simple Tubular Reactor Analysis for WSix CVD Process

Chae, Y. K., Egashira, Y., Shimogaki, Y., Sugawara, K., Komiyama, H.

MRS - Materials Research Society
5 Conference Proceedings A Kinetic Study of CVD-WSix Processes. The Comparison of WF6/SiH4 and WF6/Si2H6 Processes

Saito, T., Oshima, K., Egashira, Y., Shimogaki, Y., Komiyama, H., Sugarwara, K.

Electrochemical Society
11 Conference Proceedings In Situ Monitoring of Nucleation Stage During Aluminum-CVD for Nanostructure Control

Iino, T., Sugiyama, M., Shimogaki, Y.

Materials Research Society
6 Conference Proceedings Computer Simulation of Wsix CVD VLSI Processing Effect of Abnormal Inlet Gas Flows

Sugawara, K., Muranushi, T., Takai, T., Shimogaki, Y.K.Clae.Y., Komiyama, H., Egashira, Y.

Electrochemical Society
12 Conference Proceedings How to Model CVD Processes - Present Understanding of CVD Mechanism

Egashira, Y., Shimogaki, Y., Komiyama, H., Akiyama, Y., Sato, T., Imaishi, N., Sato, Y., Matui, I., Ohmine, T.

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12