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Wsi/WsiN/Poly:Si Gate CMOS Technology for 1.0 V DSPs

Author(s):
Kizilyalli, I.
Radosevich, J.R.
Merchant, S.
Roy, P.K.
McKinley, J.
Kuehene, S.
Bevk, J.
Ashton, R.
Singh, R.
Vaidya, H.
Kohler, R.
Bocian, B.
Freyman, R.
8 more
Publication title:
ULSI process integration : proceedings of the first international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-18
Pub. Year:
1999
Page(from):
347
Page(to):
352
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772419 [1566772419]
Language:
English
Call no.:
E23400/99-18
Type:
Conference Proceedings

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