Blank Cover Image

Dynamic Uniformity Control in a Rapid Thermal Processing System

Author(s):
Publication title:
Advances in rapid thermal processing : proceedings of the symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-10
Pub. Year:
1999
Page(from):
399
Page(to):
406
Pages:
8
Pub. info.:
Pennington, N. J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772327 [156677232X]
Language:
English
Call no.:
E23400/99-10
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Comparison of controller tuning methods for temperature uniformity control in a rapid thermal processor

K.S. Balakrishnan, W. Cho, T.F. Edgar

Society of Photo-optical Instrumentation Engineers
7 Conference Proceedings Thin Nitride Films: Pushing the Limits Using Rapid Thermal Processing

DeBoer, S. J., Thakur, R. P. S.

MRS - Materials Research Society
2 Conference Proceedings Direct Correlation Between Defects and Thermal Stress in Rapid Thermal Processing

Parihar, V., Venkataraman, S., Singh, R., Poole, K.F., Thakur, R.P.S.

Electrochemical Society
8 Conference Proceedings Advanced DRAM Capacitors Using Tantalum Pentoxide Process Technology

Thakur, R.P.S., DeBoer, S.J., AI-Shareef, H.N., Gealy, D., Schuegraf, K., Singh, R.

Electrochemical Society
3 Conference Proceedings Evaluation of Ultra-Thin Gate Oxides using Different Ambients in a Rapid Thermal Processing System

Jia, YB., Choi, J.Y., Schuor, J., Dos, J.H., Sharongpani, R., Thakur, R.P.S.

Electrochemical Society
9 Conference Proceedings Growth and Characterization of Thin Wet Oxides Grown by Rapid Thermal Processing

Sharangpani, R., Das, J., Tay, S. P., Thakur, R. P. S., Yang, T. C., Saraswat, K. C.

MRS - Materials Research Society
4 Conference Proceedings ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING

Nagabushnam, V., Singh, R. K., Thakur, R. P. S.

MRS - Materials Research Society
10 Conference Proceedings Rapid Thermal Processing-Manufacturing Perspective

Thakur, R. P. S., Schuegraf, K., Fazan, P., Rhodes, H., Zahorik, R.

MRS - Materials Research Society
5 Conference Proceedings Rapid Photothermal Processing of High Dielectric Constant Materials

Singh, R., Chen, Y., DeBoer, S., Thakur, R.P.S.

Electrochemical Society
11 Conference Proceedings ADVANCED DRAM CELL DIELECTRIC FILMS USING RAPID THERMAL PROCESSING

Thakur, R. P. S., Mathews, V. K., Fazan, P. C.

MRS - Materials Research Society
6 Conference Proceedings Critical Considerations and Integration Issues in the Design of an RTP System

Got, A., Karen, Z., Timons, P.J., Thakur, R.P.S.

Electrochemical Society
12 Conference Proceedings RECRYSTALLIZATION OF AMORPHOUS SILICON USING RAPID THERMAL PROCESSING LASER ANNEALING AND FURNACE HEATING

Viatella, J., Singh, R. K., Thakur, R. P. S., Sandhu, G., Harkness, S. D.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12