Blank Cover Image

Electrochemical Study of Copper Deposition on Silicon Surfaces in HF Solutions

Author(s):
Publication title:
Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-9
Pub. Year:
1999
Page(from):
156
Page(to):
159
Pages:
4
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772310 [1566772311]
Language:
English
Call no.:
E23400/99-9
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings IMPACT OF THE ELECTROCHEMICAL PROPERTIES OF SILICON WAFER SURFACES ON COPPER OUTPLATING FROM HF SOLUTIONS

Teerlinck, I., Schmidt, H.F., Rotondaro, A.L.P., Hurd, T.Q., Mouche, L., Mertens, P.W., Meuris, M., Heyns, M.M., …

Electrochemical Society
7 Conference Proceedings Etching of Germanium in Hydrogenperoxide Solutions

L. M. Huygens, W. Gomes, K. Strubbe

Electrochemical Society
2 Conference Proceedings 18 Optimized HF Solutions in ULSI Technology

Teerlinck, I., Mertens, P.W., Vos, R., Meuris, M., Heyns, M.M.

Electrochemical Society
8 Conference Proceedings GRAZINGEMISSION X-RAY FLUORESCENCE SPECTROMETRY: A NOVEL TOOL FOR SURFACE CONTAMINATION ANALYSIS AND THIN FILM METROLOGY

deBokx, P.K., Kidd, S.J., Wiener, G., Urbach, H.P., De Gendt, S., Mertens, P.W., Heyns, M.M.

Electrochemical Society
3 Conference Proceedings In-situ and real time characterization of wet chemical silicon surface processes by electrochemical open circuit potential measurements

Schmidt, H.F, Teerlinck, I., Meuris, M., Mertens, P.W., Heyns, M.M.

Electrochemical Society
9 Conference Proceedings Electrochemical Behavior of (100) Germanium in Copper (II) Containing Solutions

K. Strubbe, I. Huygens

Electrochemical Society
4 Conference Proceedings SILICON SURFACE ROUGHENING BY THE DECOMPOSITION OF HYDROGEN PEROXIDE

Mertens, P.W., Verhaverbeke, S., Heyns, M.M., Hellemans, L., Snauwaert, J., Dillenbeck, K.

Electrochemical Society
10 Conference Proceedings A Photoelectrochemical Study of InxGal-xN Films *

Theuwis, A., Strubbe, K., Gomes, W.

Electrochemical Society
5 Conference Proceedings On the Effect of Surface Pre-Treatment upon the Electronic Structure of N-GaN Surfaces

Strubbe, K., Gomes, W.P., Huygens, I.M.

Electrochemical Society
11 Conference Proceedings MODELLING OF THE HYDROGEN PASSIVATION KINETICS OF Si IN DILUTE HF SOLUTIONS

Verhaverbeke, S., Meuris, M., Schmidt, H., Mertens, P., Heyns, M.

Electrochemical Society
6 Conference Proceedings EVALUATION OF Si SURFACE CONDITIONS BY THE USE OF A SURFACE PHOTOVOLTAGE TECHNIQUE

Trauwaert, M.-A., Kenis, K., Caymax, M., Mertens, P.W., Heyns, M.M., Vanhellemont, J., Graf, D., Wagner, P.

Electrochemical Society
12 Conference Proceedings Characterization of Ge Implanted with Ni and Hf Ions

S. Sioncke, E.R. Simoen, T. Janssens, M.M. Meuris, P.W. Mertens

Electrochemical Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12