A Model of Superfihling in Damascene Electroplating

A Model of Superfihling in Damascene Electroplating

Author(s):

Publication title:

Electrochemical processing in ULSI fabrication and semiconductor/metal deposition II : proceedings of the international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

99-9

Pub. Year:

1999

Page(from):

52

Page(to):

60

Pages:

9

Pub. info.:

Pennington, N.J.: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772310 [1566772311]

Language:

English

Call no.:

E23400/99-9

Type:

Conference Proceedings

Details

TDL ID:	ZA00013939
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Electrochemical processing in ULSI fabrication and semiconductor/metal deposition
Conf. info. (Number):	2nd
Conf. info. (Venue):	Seattle, Washington, USA
Conf. info. (Date):	1999.05.03-1999.05.06

Similar Items:

1 Conference Proceedings Model of Superfilling in Damascene Electroplating: Comparison of Experimental Feature Filling with Model Predictions Deligianni, H., Horkans, J., Kwietniak, K., Dukovic, J.O., Andricacos, P.C., Boettcher, S., Seo, S.-C., Locke, P., … Electrochemical Society	7 Conference Proceedings Computational Aspects of the Terminal Effect on Wafer-Scale Uniformity Deligianni, H., Dukovic, J., Mebdizadeb, S. Electrochemical Society
2 Conference Proceedings Damascene Electroplating for Copper Interconnections Andriacacos, P.C., Uzoh, C., Dukovic, J.O., Horkans, J., Deligianni, H. Electrochemical Society	8 Conference Proceedings On the Anomalous Codeposition of Ferrous Metal Alloys Andricacos, P.C. Electrochemical Society
3 Conference Proceedings Model of Wafer Thickness Uniformity in an Electroplating Tool Deligianni, H., Dukovic, J.O., Walton, E.G., Contolini, R.J., Reid, J., Patton, E. Electrochemical Society	9 Conference Proceedings Fabrication challenges for next-generation devices: MEMS for rf wireless communications (Invited Paper) Seeger, D.E., Lund, J., Jahnes, C., Deligianni, L., Buchwalter, P., Andricacos, P.C., Acosta, R.E., Babich, I.V., … SPIE-The International Society for Optical Engineering
4 Conference Proceedings 3. Electrochemical fabrication of PbSn C4 Interconnections Datta, M., Shenoy, R.V., Jahnes, C., Andricacos, P.C., Horkans, J., Dukovic, J.O., Romankiw, L.T., Roeder, J., … Electrochemical Society	10 Conference Proceedings Mechanisms for Microstructure Evolution in Electroplated Copper Thin Films Harper, J. M. E., Cabral, C., Jr., Andricacos, P. C., Gignac, L., Noyan, I. C., Rodbell, K. P., Hu, C. K. MRS - Materials Research Society
5 Conference Proceedings Field Effect in "Overplating" Above Damascene Trench Clusters Dukovic, J.O., Yu, C. Electrochemical Society	11 Conference Proceedings Microstructure and Texture of Electroplated Copper in Damascene Structures Gross, M. E., Lingk, C., Siegrist, T., Coleman, E., Brown, W. L., Ueno, K., Tsuchiya, Y., Itoh, N., Ritzdorf, T., … MRS - Materials Research Society
6 Conference Proceedings Dopants in Electroplated Copper Andricacos, P.C., Parks, C., Cabral, C., Wachnik, R., Tsai, R., Maihotra, S., Locke, P., Fluegel, J., Horkans, J., … Electrochemical Society	12 Conference Proceedings Uniform Copper Electroplating on Resistive Substrates Fang, R., Namiki, K., Vereecken, P.M., Kwietniak, K.T., Baker, B.C., Ide, K., Suzuki, H., Kanda, H., Mishima, K., … Electrochemical Society

1

2

3

4

5

6

7

8

9

10

11

12