Silicon Etch By-Product Measurements Using FTIR Techniques

Silicon Etch By-Product Measurements Using FTIR Techniques

Author(s):

Cripe, J. ( Motorola )
D'Acosta, C. ( Motorola )
White, J. ( Motorola )

Publication title:

Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

99-8

Pub. Year:

1999

Page(from):

147

Page(to):

155

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772303 [1566772303]

Language:

English

Call no.:

E23400/99-8

Type:

Conference Proceedings

Details

TDL ID:	ZA00013938
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 195th
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	1999.05.00

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