Recovery of Perfluorocompounds (PFCs) from Semiconductor Manufacturing Processes Using a Membrane-Based System

Recovery of Perfluorocompounds (PFCs) from Semiconductor Manufacturing Processes Using a Membrane-Based System

Author(s):

Foder, M. ( Air Products and Chemicals, Inc. )
Wimmer, R. ( Air Products and Chemicals, Inc. )
Yang, J. ( Air Products and Chemicals, Inc. )
McCay, T. ( Motorola )

Publication title:

Environmental issues in the electronics and semiconductor industries : proceedings of the second international symposium

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

99-8

Pub. Year:

1999

Page(from):

60

Page(to):

69

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772303 [1566772303]

Language:

English

Call no.:

E23400/99-8

Type:

Conference Proceedings

Details

TDL ID:	ZA00013938
Series ID:	PA00000028
Conf. info. (Name):	Symposium on Environmental Issues with Materials and Processes in the Electronics and Semiconductor Industries ; Meeting of the Electrochemical Society
Conf. info. (Number):	2nd ; 195th
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	1999.05.00

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