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Characterization, Electrical Properties, and Interface Engineering of Sputtered Ba0.5Sr0.5 TiO3 Thin Films for DRAM Applications

Author(s):
Chu, P.
Zafar, S.
Kottke, M.
Remmel, T.
Melnick, B.
Jones, R.E., Jr.
1 more
Publication title:
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-7
Pub. Year:
1999
Page(from):
83
Page(to):
90
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772297 [156677229X]
Language:
English
Call no.:
E23400/99-7
Type:
Conference Proceedings

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