Blank Cover Image

Optimization of Teflon AF Film Characteristics Using Processing Parameters

Author(s):
Publication title:
Low and High Dielectric Constant Materials : Materials Science, Processing, and Reliability Issues, proceedings of the fourth International Symposium and Thin Film Materials for Advanced Packaging Technologies : proceedings of the second International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-7
Pub. Year:
1999
Page(from):
24
Page(to):
31
Pages:
8
Pub. info.:
Pennington, N.J.: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772297 [156677229X]
Language:
English
Call no.:
E23400/99-7
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Direct Liquid Injection Assisted Chemical Vapor Deposition of Low Constant Materials

Sharangpani, R., Singh, R., Parihar, V., Thakur, R.P.S.

Electrochemical Society
7 Conference Proceedings X-RAY DOUBLE CRYSTAL ANALYSIS OF STRUCTURE AND STRESS RELAXATION IN SOLID PHASE EPITAXIAL CaF2 AND Ge/CaF2 FILMS ON (111) Si BY IN SITU RAPID ISOTHERMAL …

Chaudhuri, J., Hashmi, F., Singh, R., Thakur, R. P. S.

Materials Research Society
2 Conference Proceedings Direct Correlation Between Defects and Thermal Stress in Rapid Thermal Processing

Parihar, V., Venkataraman, S., Singh, R., Poole, K.F., Thakur, R.P.S.

Electrochemical Society
8 Conference Proceedings Evaluation of Ultra-Thin Gate Oxides using Different Ambients in a Rapid Thermal Processing System

Jia, YB., Choi, J.Y., Schuor, J., Dos, J.H., Sharongpani, R., Thakur, R.P.S.

Electrochemical Society
3 Conference Proceedings Rapid Photothermal Processing of High Dielectric Constant Materials

Singh, R., Chen, Y., DeBoer, S., Thakur, R.P.S.

Electrochemical Society
9 Conference Proceedings Novel Applications of Rapid Photothermal Chemical Vapor Deposition

Singh, R., Parihar, V., Chen, Y., Poole, K. F., DeBoer, S., Thakur, R. P. S., Sharangpani, R., Vasudev, P. K.

MRS - Materials Research Society
4 Conference Proceedings Advanced DRAM Capacitors Using Tantalum Pentoxide Process Technology

Thakur, R.P.S., DeBoer, S.J., AI-Shareef, H.N., Gealy, D., Schuegraf, K., Singh, R.

Electrochemical Society
10 Conference Proceedings Process Integration Issues for Interlevel Dielectric Materials for Sub-Quarter Micron Silicon Integrated Circuits

Parihar, Vijay, Singh, R.

MRS - Materials Research Society
5 Conference Proceedings ANALYSIS OF CRITICAL PARAMETERS AFFECTING THE TEMPERATURE UNIFORMITY DURING RAPID THERMAL PROCESSING

Nagabushnam, V., Singh, R. K., Thakur, R. P. S.

MRS - Materials Research Society
11 Conference Proceedings ADVANCED DRAM CELL DIELECTRIC FILMS USING RAPID THERMAL PROCESSING

Thakur, R. P. S., Mathews, V. K., Fazan, P. C.

MRS - Materials Research Society
6 Conference Proceedings Thin Nitride Films: Pushing the Limits Using Rapid Thermal Processing

DeBoer, S. J., Thakur, R. P. S.

MRS - Materials Research Society
12 Conference Proceedings IMPORTANCE OF THE PHOTOEFFECTS IN RAPID ISOTHERMAL PROCESSING (RIP)

Singh, R., Mavoori, J., Thakur, R. P. S., Narayanan, S.

MRS - Materials Research Society
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12