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Characterization of Gate Dielectric Layers with Secondary Ion Mass Spectrometry (SIMS)

Author(s):
Erickson, J.W.
Brock, R.
Killian, A.
Johnston, G.
Trotter, D.
Nouri, F.
1 more
Publication title:
Silicon nitride and silicon dioxide thin insulating films, proceedings of the fifth International Symposium
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-6
Pub. Year:
1999
Page(from):
155
Page(to):
166
Pages:
12
Pub. info.:
Pennington, New Jersey: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772280 [1566772281]
Language:
English
Call no.:
E23400/99-6
Type:
Conference Proceedings

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