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Diffusion and Gettering of 3d Transition Metals (Fe, Cu, Ni) in Silicon-On-Insulator Structures

Author(s):
Korablev, K ( (North Carolina State University) )
Kononchuk, O ( (SHE America Inc) )
Yarykin, N ( (North Carolina State University) )
Glasko, I ( (North Carolina State University) )
Uspenskaya, L ( (North Carolina State University) )
Rozgonyi, G ( (North Carolina State University) )
1 more
Publication title:
Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-3
Pub. Year:
1999
Page(from):
143
Page(to):
148
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772259 [1566772257]
Language:
English
Call no.:
E23400/99-3
Type:
Conference Proceedings

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