SMART CUT Technology: Industrial Status of 501 Wafer Production and New Material Developments (Invited)

SMART CUT Technology: Industrial Status of 501 Wafer Production and New Material Developments (Invited)

Author(s):: Auberton-Herve, A ( (SOITEC) )
Publication title:: Proceedings of the Ninth International Symposium on Silicon-on-Insulator Technology and Devices
Title of ser.:: Electrochemical Society Proceedings Series
Ser. no.:: 99-3
Pub. Year:: 1999
Page(from):: 93
Page(to):: 106
Pages:: 14
Pub. info.:: Pennington, NJ: Electrochemical Society
ISSN:: 01616374
ISBN:: 9781566772259 [1566772257]
Language:: English
Call no.:: E23400/99-3
Type:: Conference Proceedings

Details

TDL ID:	ZA00013933
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Silicon-on-Insulator Technology and Devices ; Meeting of the Electrochemical Society
Conf. info. (Number):	9th ; 195th
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	1999.05.02-1999.05.07

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