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Effect of Metal Contamination and Improved Cleaning Strategies

Author(s):
Mertens, P.W.
Bearda, T.
Lowewenstein, L.M.
Martin, A.R.
Hub, W.
Kolbesen, B.O.
Teerlink, I.
Vos, R.
Baeyens, M.
Gendt, S.De
Kenis, K.
Heyns, M.M.
7 more
Publication title:
Proceedings of the Third International Symposium on Defects in Silicon
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
99-1
Pub. Year:
1999
Page(from):
401
Page(to):
413
Pages:
13
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772235 [1566772230]
Language:
English
Call no.:
E23400/99-1
Type:
Conference Proceedings

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