Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation

Effect of Crystal Defects Such as COPs, Large Dislocations, and OSF Ring on Device Integrity Degradation

Author(s):

Publication title:

Proceedings of the Third International Symposium on Defects in Silicon

Title of ser.:

Electrochemical Society Proceedings Series

Ser. no.:

99-1

Pub. Year:

1999

Page(from):

324

Page(to):

341

Pages:

18

Pub. info.:

Pennington, NJ: Electrochemical Society

ISSN:

01616374

ISBN:

9781566772235 [1566772230]

Language:

English

Call no.:

E23400/99-1

Type:

Conference Proceedings

Details

TDL ID:	ZA00013931
Series ID:	PA00000028
Conf. info. (Name):	International Symposium on Defects in Silicon ; Meeting of the Electrochemical Society
Conf. info. (Number):	3rd ; 195th
Conf. info. (Venue):	Seattle, WA, USA
Conf. info. (Date):	1999.05.02-1999.05.07

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