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Synthesis and Decomposition Kinetics of Liquid Precursors for Chemical Vapor Deposition (CVD) of Barium

Author(s):
Gordon, R.G.
Barry, S.T.
Broomball-Dillard, R.N.R.
DiCeglie, Jr.N.
Liu, X.
Teff, D.J.
1 more
Publication title:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-23
Pub. Year:
1998
Page(from):
270
Page(to):
279
Pages:
10
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772174 [1566772176]
Language:
English
Call no.:
E23400/98-23
Type:
Conference Proceedings

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