Blank Cover Image

Gas Phase and Surface Reactions in C2F4 Glow Discharge Polymerization

Author(s):
Publication title:
Proceedings of the Symposium on Fundamental Gas-phase and Surface Chemistry of Vapor-phase Materials Synthesis
Title of ser.:
Electrochemical Society Proceedings Series
Ser. no.:
98-23
Pub. Year:
1998
Page(from):
197
Page(to):
202
Pages:
6
Pub. info.:
Pennington, NJ: Electrochemical Society
ISSN:
01616374
ISBN:
9781566772174 [1566772176]
Language:
English
Call no.:
E23400/98-23
Type:
Conference Proceedings

Similar Items:

1 Conference Proceedings Computer-Aided Reaction Design (CARD) to Investigate the Control of SIH4/O2 CVD by Gas-Phase Additives

Takahashi, T., Hagiwara, K., Egashira, Y., Komiyama, H.

Electrochemical Society
7 Conference Proceedings EFFECTS OF TEMPERATURE AND REACTANT CONCENTRATION ON PROPERTIES OF FINE TiO2 PARTICLES PREPARED BY VAPOR-PHASE HYDROLYSIS OF TITANIUM TETRAISOPROPOXIDE

Kirkbir, F., Komiyama, H.

Materials Research Society
2 Conference Proceedings A Kinetic Study of CVD-WSix Processes. The Comparison of WF6/SiH4 and WF6/Si2H6 Processes

Saito, T., Oshima, K., Egashira, Y., Shimogaki, Y., Komiyama, H., Sugarwara, K.

Electrochemical Society
8 Conference Proceedings Surface Modification of Glassy Polymeric Carbon by Glow Discharge

Volha Abidzina, I. Tereshko, I. Elkin, R. L. Zimmerman, I. Muntele, C. Muntele, R. A. Minamisawa, B. Chhay, D. ILA

Materials Research Society
3 Conference Proceedings Structure, Properties, and Process Characteristics of Low-K Materials Prepared by PECVD

Komiyama, H., Lim, S. W., Loh, E. G., Nakano, Y., Shimogaki, Y., Tada, K.

Materials Research Society
9 Conference Proceedings Surface Passivation of Inconel 690 Using Gas-Phase and Post-Discharge Oxidation

C. Rives, T. Czerwiec, T. Belmonte, F. Belnet, H. Michel, O. Kerrec

American Society of Mechanical Engineers
4 Conference Proceedings Reaction Analysis For Tetraethoxysilane And Ozone Atmospheric Pressure Chemical Vapor Deposition Doped Oxides

Fujino, K., Egashira, Y., Shimogaki, Y., Komiyama, H.

Electrochemical Society
10 Conference Proceedings Sensitive Analysis of Deposition Chemistry of Cu From (hfac)Cu(tmvs) Using Well-Characterized Test Structure

Chae, Y. K., Shimogaki, Y., Komiyama, H.

MRS - Materials Research Society
5 Conference Proceedings Effect of the Carrier Gases on the CVD of Tungsten from WF6-SiH4

Rhee, S.-W., Choi, H.-S., Park, S.-K., Shimogaki, Y., Komiyama, H.

Electrochemical Society
11 Conference Proceedings Characterization of polymer formation during Si02 etching with different fluorocarbon gases (CHF3,CF4,C4F8)

Loong,S.Y., Lee,H.K., Chan,L.H., Zhou,M.S., Loh,F.C., Tan,K.L.

SPIE-The International Society for Optical Engineering
6 Conference Proceedings Reaction Chemistry of InGaAsP MOCVD Studied with FTIR Gas Monitoring and Numerical Analysis on Growth Kinetics

Sugiyama, M., Shimogaki, Y., Sudo, S., Nakano, Y., Sugawara, K., Tada, K., Komiyama, H.

Electrochemical Society
12 Conference Proceedings Study on Temperature Distribution in Double Glow Discharge Zone

P.Z. Zhang, Z.Y. He, G.H. Zhang, X.F. Rong, H.Y. Wu

Trans Tech Publications
1
 
2
 
3
 
4
 
5
 
6
 
7
 
8
 
9
 
10
 
11
 
12