Poly-Si TFT Fabrication and Hydrogenation using a Process Compatible With Plastic Substrates*
- Author(s):
- Publication title:
- Proceedings of the fourth Symposium on Thin Film Transistor Technologies
- Title of ser.:
- Electrochemical Society Proceedings Series
- Ser. no.:
- 98-22
- Pub. Year:
- 1998
- Page(from):
- 174
- Page(to):
- 184
- Pages:
- 11
- Pub. info.:
- Pennington, NJ: Electrochemical Society
- ISSN:
- 01616374
- ISBN:
- 9781566772167 [1566772168]
- Language:
- English
- Call no.:
- E23400/98-22
- Type:
- Conference Proceedings
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